High-Q RF inductors on 20 Ohm.cm silicon realized through wafer-level packaging techniques

Carchon, GeertGeertCarchonDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyne2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7280High-Q RF inductors on 20 Ohm.cm silicon realized through wafer-level packaging techniquesJournal article