3D stacking induced mechanical stress effects

Cherman, VladimirVladimirChermanVan der Plas, GeertGeertVan der PlasDe Vos, JoeriJoeriDe VosIvankovic, AndrejAndrejIvankovicLofrano, MelinaMelinaLofranoSimons, VeerleVeerleSimonsGonzalez, MarioMarioGonzalezVanstreels, KrisKrisVanstreelsWang, TengTengWangDaily, RobertRobertDailyGuo, WeiWeiGuoBeyer, GeraldGeraldBeyerLa Manna, AntonioAntonioLa MannaDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/236413D stacking induced mechanical stress effectsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6897304&contentType=Conference+Publications