Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Witvrouw, AnnAnnWitvrouwRusu, C.C.RusuJanssen, HenriHenriJanssenGunn, RobertRobertGunn2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9927Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow processJournal article