Fleischmann, ClaudiaClaudiaFleischmannHoussa, MichelMichelHoussaSioncke, SonjaSonjaSionckeBeckhoff, BurkhardBurkhardBeckhoffMuller, MatthiasMatthiasMullerHonicke, PhillipPhillipHonickeMeuris, MarcMarcMeurisTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantomme2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/18915Self-affine surface roughness of chemically and thermally cleaned Ge surfacesJournal article