Investigation of the role of in-plane stress behavior on ferroelectric properties of scaled-up hafnium zirconium oxide superlattices

De, GourabGourabDePopovici, Mihaela IoanaMihaela IoanaPopoviciMukherjee, ShankhaShankhaMukherjeeKwon, Dae SeonDae SeonKwonLuciano, FedericaFedericaLucianoMurphy, TonyTonyMurphyKar, Gouri SankarGouri SankarKarDelabie, AnneliesAnneliesDelabieVan Houdt, JanJanVan Houdt2025-04-082025-04-082025-MAR 22040-3364WOS:001454658700001https://imec-publications.be/handle/20.500.12860/45505Investigation of the role of in-plane stress behavior on ferroelectric properties of scaled-up hafnium zirconium oxide superlatticesJournal article10.1039/d4nr05053cWOS:001454658700001FILMSTHINMEDLINE:40152490