Impact of residual high-energy boron implantation induced p-well defects on shallow junctions

Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenes2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4674Impact of residual high-energy boron implantation induced p-well defects on shallow junctionsProceedings paper