RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrity

Chen, WeidongWeidongChenDhayagude, T.T.DhayagudeChaparala, P.P.ChaparalaDemirlioglu, E.E.DemirliogluShenasa, M.M.ShenasaBearda, TwanTwanBeardaArnauts, SophiaSophiaArnautsMeuris, MarcMarcMeuris2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1765RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrityProceedings paper