Absil, PhilippePhilippeAbsilRagnarsson, Lars-AkeLars-AkeRagnarssonHoffmann, Thomas Y.Thomas Y.HoffmannBiesemans, SergeSergeBiesemans2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14863ALD high-K and metal gate solutionsOral presentation