Si-cap-free low-DIT SiGe gate stack for high-performance pFETs

Arimura, HiroakiHiroakiArimuraWostyn, KurtKurtWostynRagnarsson, Lars-AkeLars-AkeRagnarssonConard, ThierryThierryConardVaisman Chasin, AdrianAdrianVaisman ChasinFranco, JacopoJacopoFrancoMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchi2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34642Si-cap-free low-DIT SiGe gate stack for high-performance pFETsMeeting abstracthttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/142831