Van Besien, ElsElsVan BesienJourdan, NicolasNicolasJourdanZhao, LarryLarryZhaoCroes, KristofKristofCroesSiew, Yong KongYong KongSiewVan Elshocht, SvenSvenVan ElshochtTokei, ZsoltZsoltTokei2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19949Evaluation of Mn-based Cu barriers for interconnect applicationsOral presentationhttp://www.avssymposium.org/