Le, Quoc ToanQuoc ToanLeVereecke, GuyGuyVereeckeBertha, AnneAnneBerthaKesters, ElsElsKestersLux, MarcelMarcelLuxStruyf, HerbertHerbertStruyf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19262Effect of chemical solutions and surface wettability on the stability of advanced porous low-k materialsProceedings paper