Low optical loss ohmic contacts on heavily doped n-type InGaAs for InP membrabes devices

Shen, LongfeiLongfeiShenvan Veldhoven, renerenevan VeldhovenJiao, YuqingYuqingJiaoDolores-Calzadilla, VictorVictorDolores-CalzadillaVan der Tol, JosJosVan der TolRoelkens, GuntherGuntherRoelkensSmit, MeintMeintSmit2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25895Low optical loss ohmic contacts on heavily doped n-type InGaAs for InP membrabes devicesProceedings paper