Optical retroreflective marker fabricated on silicon-on-insulator

Van Acoleyen, KarelKarelVan AcoleyenO'Brien, D.C.D.C.O'BrienPayne, F.F.PayneBogaerts, WimWimBogaertsBaets, RoelRoelBaets2021-10-192021-10-192011-101943-0655https://imec-publications.be/handle/20.500.12860/19943Optical retroreflective marker fabricated on silicon-on-insulatorJournal article