Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range

Pan, WanlingWanlingPanSoussan, PhilippePhilippeSoussanNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10975Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning rangeProceedings paper