ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties

Chiodarelli, NicoloNicoloChiodarelliDelabie, AnneliesAnneliesDelabieMasahito, SugiuraSugiuraMasahitoKashiwagi, YusakuYusakuKashiwagiRichard, OlivierOlivierRichardBender, HugoHugoBenderCott, DaireDaireCottHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18684ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical propertiesProceedings paper