Impact of dissolved oxygen in dilute HF solution on material etch

Kesters, ElsElsKestersIwasaki, AkihisaAkihisaIwasakiLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26818Impact of dissolved oxygen in dilute HF solution on material etchProceedings paperhttp://www.scientific.net/SSP.255.251