Collaert, NadineNadineCollaertRooyackers, RitaRitaRooyackersHikavyy, AndriyAndriyHikavyyDixit, AbhisekAbhisekDixitLeys, FrederikFrederikLeysVerheyen, PeterPeterVerheyenLoo, RogerRogerLooJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11897Multi-gate devices for the 32nm technology node and beyond: challenges for selective epitaxial growthMeeting abstract