Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach

Hoenicke, PhilippPhilippHoenickeDetlefs, BlankaBlankaDetlefsFleischmann, ClaudiaClaudiaFleischmannVandervorst, WilfriedWilfriedVandervorstMueller, MatthiasMatthiasMuellerNolot, EmmanuelEmmanuelNolotGrampeix, HelenHelenGrampeixBeckhoff, BurkhardBurkhardBeckhoff2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25390Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approachProceedings paperhttps://www.nist.gov/sites/default/files/documents/pml/div683/conference/FCMN_CD.pdf