Distinction between silicon and oxide traps using single-trap spectroscopy

Fang, WenWenFangSimoen, EddyEddySimoenAoulaiche, MarcMarcAoulaicheLuo, JunJunLuoZhao, ChaoChaoZhaoClaeys, CorCorClaeys2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23804Distinction between silicon and oxide traps using single-trap spectroscopyMeeting abstract