Wu, WenWenWuBrongersma, SywertSywertBrongersmaVervoort, IwanIwanVervoortBender, HugoHugoBenderVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8413Electrical and microstructural characterization of narrow Cu interconnectsOral presentation