Villarreal, RenanRenanVillarrealZarkua, ZviadiZviadiZarkuaKretschmer, SilvanSilvanKretschmerHendriks, VinceVinceHendriksHillen, JonasJonasHillenTsai, Hung-ChiehHung-ChiehTsaiJunge, FelixFelixJungeNissen, MatzMatzNissenSaha, TanusreeTanusreeSahaAchilli, SimonaSimonaAchilliHofsa''ss, Hans C.Hans C.Hofsa''ssMartins, MichaelMichaelMartinsDe Ninno, GiovanniGiovanniDe NinnoLacovig, PaoloPaoloLacovigLizzit, SilvanoSilvanoLizzitDi Santo, GiovanniGiovanniDi SantoPetaccia, LucaLucaPetacciaDe Feyter, StevenStevenDe FeyterDe Gendt, StefanStefanDe GendtBrems, StevenStevenBremsvan de Vondel, JorisJorisvan de VondelKrasheninnikov, Arkady V.Arkady V.KrasheninnikovPereira, Lino M. C.Lino M. C.Pereira2025-07-072024-07-102025-07-0720241936-0851WOS:001259897100001https://imec-publications.be/handle/20.500.12860/44141Journal article10.1021/acsnano.4c03475WOS:001259897100001ION-IMPLANTATIONINDUCED DEFECTSCARBONNITROGENMETALSGROWTHOXYGENMEDLINE:38938181