Composite polymer core–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMP

Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11658Composite polymer core–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMPJournal article