Chen, Shih-HungShih-HungChenVeloso, AnabelaAnabelaVelosoMertens, HansHansMertensHellings, GeertGeertHellingsSimicic, MarkoMarkoSimicicChen, Wen ChiehWen ChiehChenWu, Wei-MinWei-MinWuSerbulova, KaterynaKaterynaSerbulovaLinten, DimitriDimitriLintenHoriguchi, NaotoNaotoHoriguchi2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34886ESD protection diodes in sub-5nm gate-all-around nanosheet technologiesMeeting abstracthttps://ieeexplore.ieee.org/document/9241334