Ciesielski, RichardRichardCiesielskiSaadeh, QaisQaisSaadehNaujok, PhilippPhilippNaujokOpsomer, KarlKarlOpsomerSoulie, Jean-PhilippeJean-PhilippeSoulieWu, MeiyiMeiyiWuPhilipsen, VickyVickyPhilipsenVan de Kruijs, RobbertRobbertVan de KruijsKolbe, MichaelMichaelKolbeScholze, FrankFrankScholzeSoltwisch, VictorVictorSoltwisch2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36574Optical constants for EUV scatterometryProceedings paper