Fang, ChaoChaoFangSmith, Mark DMark DSmithVaglio Pret, AlessandroAlessandroVaglio PretBiafore, JohnJohnBiaforeRobertson, Steward ASteward ARobertsonBekaert, JoostJoostBekaert2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23802A compact physical CD-SEM simulator for IC photolithography modeling applicationsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1906647