Gorissen, BenjaminBenjaminGorissenVan Hoof, ChrisChrisVan HoofReynaerts, DominiekDominiekReynaertsDe Volder, MichaelMichaelDe Volder2021-10-232021-10-2320162055-7434https://imec-publications.be/handle/20.500.12860/26658SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuatorsJournal articlehttp://www.nature.com/articles/micronano201645