Bellenger, FlorenceFlorenceBellengerDe Jaeger, BriceBriceDe JaegerMerckling, ClementClementMercklingHoussa, MichelMichelHoussaPenaud, JulienJulienPenaudNyns, LauraLauraNynsVrancken, EviEviVranckenCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisHoffmann, Thomas Y.Thomas Y.HoffmannDe Meyer, KristinKristinDe MeyerHeyns, MarcMarcHeyns2021-10-182021-10-1820100741-3106https://imec-publications.be/handle/20.500.12860/16727High FET performance for a future CMOS GeO2-based technologyJournal article