Hourdakis, E.E.HourdakisTheodoropoulou, M.M.TheodoropoulouNassiopoulou, A.G.A.G.NassiopoulouParisini, A.A.ParisiniReading, M.A.M.A.Readingvan den Berg, J.A.J.A.van den BergConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15487Comparison of electrical measurements with structural analysis of thin high-k hafnium-based filmsProceedings paper