Jiang, JingJingJiangDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenberghe2021-10-242021-10-2420170914-9244https://imec-publications.be/handle/20.500.12860/28604Metal sensitizer in chemically amplified EUV resist: a study of sensitivity enhancement and dissolutionJournal articlehttps://www.jstage.jst.go.jp/article/photopolymer/30/5/30_591/_article