Advanced dielectrics targeting 2X DRAM MIM capacitors

Popovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsAoulaiche, MarcMarcAoulaicheRedolfi, AugustoAugustoRedolfiKaczer, BenBenKaczerKim, Min-SooMin-SooKimDouhard, BastienBastienDouhardDelabie, AnneliesAnneliesDelabieClima, SergiuSergiuClimaJurczak, GosiaGosiaJurczakVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22949Advanced dielectrics targeting 2X DRAM MIM capacitorsProceedings paperhttp://ecst.ecsdl.org/content/58/10/143.full.pdf+html?sid=8e4810f2-6b37-45b2-9e27-35b064120d2e