Favia, PaolaPaolaFaviaRichard, OlivierOlivierRichardEneman, GeertGeertEnemanMertens, HansHansMertensArimura, HiroakiHiroakiArimuraCapogreco, ElenaElenaCapogrecoHikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersKundu, ParomitaParomitaKunduLoo, RogerRogerLooVancoille, EricEricVancoilleBender, HugoHugoBender2021-10-272021-10-2720190268-1242https://imec-publications.be/handle/20.500.12860/32954TEM investigations of gate-all-around nanowire devicesJournal articlehttps://iopscience.iop.org/article/10.1088/1361-6641/ab4b8b