Filitchkin, PaulPaulFilitchkinDo, ThuyThuyDoKusnadi, IrIrKusnadiSturtevant, JohnJohnSturtevantDe Bisschop, PeterPeterDe BisschopVan de Kerkhove, JeroenJeroenVan de Kerkhove2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15308Contour-quality assessment for OPC model calibrationProceedings paper