Pollentier, IvanIvanPollentierNeira, ImanolImanolNeiraGronheid, RoelRoelGronheid2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19588Assessment of resist outgassing related EUV optics contamination for CAR and non-CAR material chemistriesProceedings paper