Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)

Lukaszewicz, MikolajMikolajLukaszewiczde Marneffe, Jean-FrancoisJean-Francoisde MarneffeWilson, ChrisChrisWilsonZhang, LipingLipingZhangPeng, Hsing-YingHsing-YingPengVerdonck, PatrickPatrickVerdonckBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21066Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)Meeting abstract