Chiappe, DanieleDanieleChiappeAsselberghs, IngeIngeAsselberghsHeyne, MarkusMarkusHeyneIacovo, SerenaSerenaIacovoSayan, SafakSafakSayanHuyghebaert, CedricCedricHuyghebaertCaymax, MattyMattyCaymaxAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmansHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtRadu, IulianaIulianaRaduThean, AaronAaronThean2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26443Synthesis of wafer-scale TMD films and heterostructures by chemical vapor sulfurization and selenizationMeeting abstract