Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices

Breuil, LaurentLaurentBreuilEl Hajjam, GabrielGabrielEl HajjamRamesh, SivaSivaRameshAjaykumar, ArjunArjunAjaykumarArreghini, AntonioAntonioArreghiniZhang, LipingLipingZhangSebaai, FaridFaridSebaaiNyns, LauraLauraNynsRaymaekers, TomTomRaymaekersRosmeulen, MaartenMaartenRosmeulenVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemont2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34821Integration of Ruthenium-based Wordline in a 3-D NAND Memory DevicesProceedings paperhttps://ieeexplore.ieee.org/abstract/document/9108111