Impact of surface preparation prior to AlOx deposition for i-PERC cells

Penaud, JulienJulienPenaudJaffrennou, PérinePérineJaffrennouRothschild, AudeAudeRothschildLombardet, BenoîtBenoîtLombardet2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21279Impact of surface preparation prior to AlOx deposition for i-PERC cellsProceedings paperhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6317791