Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction

Soethoudt, JobJobSoethoudtTomczak, YoannYoannTomczakDelabie, AnneliesAnneliesDelabie2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34043Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reactionMeeting abstract