Maenhoudt, MireilleMireilleMaenhoudtVerhaegen, StafStafVerhaegenRonse, KurtKurtRonseFlagello, D.D.FlagelloGeh, B.B.GehKaiser, W.W.Kaiser2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3642Feasibility of printing 0.1μm technology with optical lithographyProceedings paper