Studies on resolution with ZEP530A for EUV mask

Shirotori, AkihideAkihideShirotoriTsutsumi, TakashiTakashiTsutsumiYeh, Sin FuSin FuYehKuroyanagi, KenjiKenjiKuroyanagi2024-08-202024-06-062024-08-202024978-1-5106-7218-50277-786XWOS:001222851800027https://imec-publications.be/handle/20.500.12860/43994Studies on resolution with ZEP530A for EUV maskProceedings paper10.1117/12.3010109978-1-5106-7219-2WOS:001222851800027