High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node

Neumann, J.T.J.T.NeumannGarbowski, T.T.GarbowskiHögele, W.W.HögeleKorb, T.T.KorbHalder, SandipSandipHalderLeray, PhilippePhilippeLerayGarreis, R.R.Garreisle Maire, M.M.le MaireZeidler, D.D.Zeidler2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29076High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic nodeProceedings paper10.1117/12.2257980