Reduced self-heating by strained silicon substrate engineering

O'Neill, A.A.O'NeillOlsen, S.S.OlsenYang, Y.Y.YangAgaiby, R.R.AgaibyHellstrom, P.EP.EHellstromOstling, M.M.OstlingLyutovich, K.K.LyutovichKasper, E.E.KasperEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenLoo, RogerRogerLooClaeys, CorCorClaeysFiegna, C.C.FiegnaSangiorgi, E.E.Sangiorgi2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12644Reduced self-heating by strained silicon substrate engineeringMeeting abstract