GaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reduction

Gonzalez, MarioMarioGonzalezCheng, KaiKaiChengTseng, PeterPeterTsengBorghs, GustaafGustaafBorghs2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20734GaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reductionProceedings paper