Lagrange, SébastienSébastienLagrangeBrongersma, SywertSywertBrongersmaJudelewicz, MosheMosheJudelewiczSaerens, AnneliesAnneliesSaerensVervoort, IwanIwanVervoortRichard, EmmanuelEmmanuelRichardPalmans, RogerRogerPalmansMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4507Self-annealing characterization of electroplated copper filmsJournal article