Comprehensive investigation of the impact of lateral charge migration on retention performance of planar and 3D SONOS devices

Maconi, AlessandroAlessandroMaconiArreghini, AntonioAntonioArreghiniMonzio Compagnoni, ChristianChristianMonzio CompagnoniVan den Bosch, GeertGeertVan den BoschSpinelli, Alessandro S.Alessandro S.SpinelliVan Houdt, JanJanVan HoudtLacaita, Andrea L.Andrea L.Lacaita2021-10-202021-10-2020120038-1101https://imec-publications.be/handle/20.500.12860/21072Comprehensive investigation of the impact of lateral charge migration on retention performance of planar and 3D SONOS devicesJournal article