Source polarization and OPC effects on illumination optimization

Brist, TravisTravisBristBailey, George E.George E.BaileyDrozdov, AlexanderAlexanderDrozdovTorres, AndresAndresTorresEstroff, AndrewAndrewEstroffHendrickx, EricEricHendrickx2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10156Source polarization and OPC effects on illumination optimizationProceedings paper