Jonckheere, RikRikJonckheereMelvin, LawrenceLawrenceMelvinCapelli, RenzoRenzoCapelli2021-10-272021-10-272019-09https://imec-publications.be/handle/20.500.12860/33230Stochastic printing behavior of ML-defects on EUV maskProceedings paperhttps://doi.org/10.1117/12.2538153