The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography

Humphris, AndrewAndrewHumphrisMoussa, AlainAlainMoussaDusa, MirceaMirceaDusaCharley, Anne-LaureAnne-LaureCharleyNewman, EllisEllisNewmanGoulden, JennyJennyGouldenFeng, LeiLeiFengBevis, ChristopherChristopherBevis2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35291The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithographyProceedings paperhttps://doi.org/10.1117/12.2552054