Erofeev, IvanIvanErofeevMareum Khan, MuhaiminMuhaiminMareum KhanAabdin, ZainulZainulAabdinRay Chowdhuri, AngshumanAngshumanRay ChowdhuriPacco, AntoineAntoinePaccoPhilipsen, HaroldHaroldPhilipsenHolsteyns, FrankFrankHolsteynsMirsaidov, UtkurUtkurMirsaidov2024-02-052023-09-062024-02-052023-081012-0394https://imec-publications.be/handle/20.500.12860/42471Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry EtchingProceedings paperhttps://doi.org/10.4028/p-B71ad1Materials scienceplasma oxidationmetal etchingatomic layer etching