Siew, Yong KongYong KongSiewJourdan, NicolasNicolasJourdanCiofi, IvanIvanCiofiCroes, KristofKristofCroesWilson, ChrisChrisWilsonTang, BaojunBaojunTangDemuynck, StevenStevenDemuynckAi, HuangHuangAiCellier, DanielDanielCellierCockburn, AndrewAndrewCockburnBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24524Cu wire resistance improvement using Mn-based self-formed barriersProceedings paperCu wire resistance improvement using Mn-based self-formed barriers